The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Sep. 09, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Yash Chhabra, Bangalore, IN;
Abyaya Dhar, Bangalore, IN;
Boon Sen Chan, Singapore, SG;
Yenwei Hung, Taoyuan, TW;
Sidda Reddy Kurakula, Bengaluru, IN;
Chandrasekhar Roy, Bangalore, IN;
Chih Chuan Wang, Hsinchu, TW;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes identifying an image of a substrate processing equipment part that forms a plurality of holes. The method further includes determining, by a processing device based on the image, a corresponding neighboring angular distance of each of the plurality of holes and a corresponding area of each of the plurality of holes. The method further includes identifying, by the processing device, a first subset of the plurality of holes that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes. A corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.