The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Mar. 17, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 21/08 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); C25D 21/10 (2006.01); C25D 21/12 (2006.01);
U.S. Cl.
CPC ...
C25D 21/08 (2013.01); C25D 17/005 (2013.01); C25D 17/06 (2013.01); C25D 21/10 (2013.01); C25D 21/12 (2013.01);
Abstract
A plating apparatusincludes a plating tank, a substrate holder, a rotation mechanism, an elevating mechanism, a contact member, and a cleaning deviceconfigured to clean the contact member. The cleaning deviceincludes a pivot shaft, a first arm, a second arm, and a nozzlethat includes at least one discharge port. Applying a cleaning fluid discharged from the discharge port to the contact membercleans the contact member