The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Sep. 19, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Morgan Evans, Manchester, MA (US);
Rutger Meyer Timmerman Thijssen, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); F21V 8/00 (2006.01); G02B 27/01 (2006.01);
U.S. Cl.
CPC ...
G02B 6/0045 (2013.01); G02B 5/1828 (2013.01); G02B 5/1857 (2013.01); G02B 6/0016 (2013.01); G02B 6/0033 (2013.01); G02B 6/0065 (2013.01); G02B 27/0172 (2013.01);
Abstract
An apparatus with a grating structure and a method for forming the same are disclosed. The grating structure includes forming a recess in a grating layer. A plurality of channels is formed in the grating layer to define slanted grating structures therein. The recess and the slanted grating structures are formed using a selective etch process.