The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Aug. 16, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Shimpei Miura, Mie Mie, JP;
Hiroshi Tsukada, Yokkaichi Mie, JP;
Kiminori Yoshino, Kuwana Mie, JP;
Hiroyuki Tanizaki, Nagoya Aichi, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/398 (2020.01); H01L 27/02 (2006.01); G06F 111/10 (2020.01);
U.S. Cl.
CPC ...
G06F 30/398 (2020.01); H01L 27/0207 (2013.01); G06F 2111/10 (2020.01);
Abstract
A modeling method of shape-approximating a shape measurement target provided in a structure having a stack structure by a boundary line, and a standard deviation is provided as a tolerance for a measurement value of the shape measurement target, and a calculation boundary line is arranged to converge within the tolerance, and thereby, a shape of the shape measurement target is expressed.