The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2024

Filed:

Sep. 23, 2021
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Chia-Tze Huang, Hsing-Chu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); H10B 41/10 (2023.01); H10B 41/27 (2023.01); H10B 41/35 (2023.01); H10B 43/10 (2023.01); H10B 43/35 (2023.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); H10B 41/10 (2023.02); H10B 41/27 (2023.02); H10B 41/35 (2023.02); H10B 43/10 (2023.02); H10B 43/35 (2023.02);
Abstract

Provided is a three-dimensional flash memory including a substrate, a stack structure, a stop layer, two slit trenches, a plurality of vertical channel structures, and a plurality of slit holes. The stack structure is disposed on the substrate. The stack structure includes a plurality of dielectric layers and a plurality of conductive layers stacked alternately. The stop layer is disposed between the substrate and the stack structure. The two slit trenches penetrate through the stack structure to expose the stop layer. The vertical channel structures are disposed between the two slit trenches and penetrate through the stack structure and the stop layer. The slit holes are discretely disposed between the vertical channel structures, and penetrate through the stack structure to expose the stop layer. A method of forming the three-dimensional flash memory is also provided.


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Huang, Chia-Tze. (2024). Three-dimensional flash memory and method of forming the same (U.S. Patent No. 12120873). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12120873

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