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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12119222 B1

PDFFull Text
Date of Patent:
Oct. 15, 2024

Filed:

Aug. 04, 2021

Method for preparing semiconductor structure and semiconductor structure

Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventors:

Mengmeng Yang, Hefei, CN;

Jie Bai, Hefei, CN;

Assignee:

CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;

Attorneys:

Syncoda LLC

Feng Ma

Primary Examiner:

Allison Bernstein

Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02304 (2013.01); H01L 21/0214 (2013.01); H01L 21/02164 (2013.01); H01L 21/0217 (2013.01); H01L 21/02236 (2013.01); H01L 21/02255 (2013.01); H01L 21/0228 (2013.01); H01L 21/02332 (2013.01);
Abstract

A method for preparing a semiconductor structure includes: providing a substrate which includes a device region and a shallow trench isolation region surrounding the device region, in which the device region is exposed from a surface of the substrate; depositing a barrier layer on the substrate, the barrier layer at least covering the device region; forming an initial oxide which is located in the device region and in contact with the barrier layer; and removing part of the initial oxide to form a device oxide.

Find Patent Forward Citations

Yang, Mengmeng. (2024). Method for preparing semiconductor structure and semiconductor structure (U.S. Patent No. 12119222). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12119222

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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