The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Jul. 13, 2020
Samsung Display Co., Ltd., Yongin-si, KR;
Ubmaterials Inc., Yongin-si, KR;
Joon-Hwa Bae, Suwon-si, KR;
Jin Hyung Park, Yongin-si, KR;
Bonggu Kang, Seoul, KR;
Seungbae Kang, Suwon-si, KR;
Heesung Yang, Seoul, KR;
Woojin Cho, Yongin-si, KR;
Byoung Kwon Choo, Hwaseong-si, KR;
UBMATERIALS LNC., Yongin-si, KR;
Abstract
A polishing slurry is disclosed which includes about 0.01 wt % to about 10 wt % of polishing particles, about 0.005 wt % to about 0.1 wt % of a dispersing agent, about 0.001 wt % to about 1 wt % of an oxide-polishing promoter including a pyridine compound, about 0.05 wt % to about 0.1 wt % of a nitride-polishing inhibitor including an amino acid or an anionic organic acid, and water. A method for manufacturing a display device including an active pattern disposed on a base substrate, a gate metal pattern including a gate electrode overlapping the active pattern, a planarized insulation layer disposed on the gate metal pattern, and a source metal pattern disposed on the planarized insulation layer is also disclosed.