The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2024

Filed:

Feb. 08, 2021
Applicant:

Institute of Semiconductors, Guangdong Academy of Sciences, Guangzhou, CN;

Inventors:

Yao Wang, Guangzhou, CN;

Zibai Li, Guangzhou, CN;

Yunzhi Ling, Guangzhou, CN;

Xun Xiang, Guangzhou, CN;

Yinhua Cui, Guangzhou, CN;

Chuan Hu, Guangzhou, CN;

Zhitao Chen, Guangzhou, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 23/538 (2006.01); H01L 25/065 (2023.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/485 (2013.01); H01L 21/4857 (2013.01); H01L 21/486 (2013.01); H01L 23/5383 (2013.01); H01L 25/0655 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 2224/211 (2013.01); H01L 2924/381 (2013.01);
Abstract

Provided are a chip interconnection package structure and method, including: forming a sacrificial pattern layer on a support structure; forming an interconnection winding pattern layer on the sacrificial pattern layer, wherein the interconnection winding pattern layer is corresponding to a sacrificial pattern of the sacrificial pattern layer in position; forming a first insulating layer on the interconnection winding pattern layer; forming a plurality of chips arranged at intervals on the first insulating layer, wherein the plurality of chips are respectively corresponding to the interconnection winding pattern of the interconnection winding pattern layer in position; and removing the support structure, and forming, on one side of the sacrificial pattern layer, a first interconnection hole penetrating through the sacrificial pattern, the interconnection winding pattern and the first insulating layer, and making the first interconnection hole aligned and communicated with a first interconnection pin of the chip corresponding in projection position.


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