The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Sep. 30, 2021
Applicant:
Changxin Memory Technologies, Inc., Hefei, CN;
Inventors:
Zhaopei Cui, Hefei, CN;
Bingyu Zhu, Hefei, CN;
Assignee:
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 7/00 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B08B 7/00 (2013.01); H01L 21/26513 (2013.01);
Abstract
A cleaning process for cleaning a surface of a semiconductor structure is provided, in which residue layer is formed on the surface of the semiconductor structure. The cleaning process includes providing a first reaction gas and a second reaction gas to the surface of the semiconductor structure, in which the first reaction gas reacts with the second reaction gas to remove the residue layer while forming a protection layer on the surface of the semiconductor structure.