The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
May. 11, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Christof Jalics, Heidenheim, DE;
Fabian Schuster, Bad Buchau, DE;
Holger Kierey, Aalen, DE;
Andreas Sandner, Aalen, DE;
Tobias Meisch, Essingen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G02B 5/08 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70166 (2013.01); G02B 5/0891 (2013.01); G02B 5/1861 (2013.01); G03F 7/70191 (2013.01); G03F 7/702 (2013.01);
Abstract
A mirror for an illumination optical unit of a projection exposure apparatus comprises a spectral filter in the form of a grating structure, wherein the grating structure has a maximum edge steepness in the range of 15° to 60°.
Jalics, Christof. (2024). Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirror (U.S. Patent No. 12111578). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12111578
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