The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Jun. 28, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chandan Das, Singapore, SG;
Susmit Singha Roy, Sunnyvale, CA (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
John Sudijono, Singapore, SG;
Abhijit Basu Mallick, Palo Alto, CA (US);
Mark Saly, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/04 (2006.01); C23C 16/06 (2006.01); C23C 16/448 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/305 (2013.01); C23C 16/04 (2013.01); C23C 16/06 (2013.01); C23C 16/4485 (2013.01); H01L 21/0228 (2013.01);
Abstract
Transition metal dichalcogenide films and methods for depositing transition metal dichalcogenide films on a substrate are described. Methods for converting transition metal oxide films to transition metal dichalcogenide films are also described. The substrate is exposed to a precursor and a chalcogenide reactant to form the transition metal dichalcogenide film. The exposures can be sequential or simultaneous.