The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Aug. 26, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Jian Zhang, San Jose, CA (US);
Ning Ye, San Jose, CA (US);
DanJing Huang, San Jose, CA (US);
Bin-Da Chan, San Jose, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2251 (2018.01); G01J 1/42 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01J 1/4257 (2013.01); G06T 7/001 (2013.01); G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); G01N 2223/6116 (2013.01); G06T 2207/10016 (2013.01); G06T 2207/10144 (2013.01); G06T 2207/30108 (2013.01);
Abstract
A system and a method for monitoring a beam in an inspection system are provided. The system includes an image sensor configured to collect a sequence of images of a beam spot of a beam formed on a surface, each image of the sequence of images having been collected at a different exposure time of the image sensor, and a controller configured to combine the sequence of images to obtain a beam profile of the beam.