The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
May. 26, 2020
Applicant:
Polytec Gmbh, Waldbronn, DE;
Inventors:
Henrik Schmid, Keltern-Ellmendingen, DE;
Volker Seyfried, Nussloch, DE;
Assignee:
Polytec GmbH, Waldbronn, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 11/30 (2013.01);
Abstract
The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (). The essence of the invention is that the light intensities I(z) of at least one other detector element q of the multi-element detector () are also used besides the light intensities I(z) of this detector element to determine the value zassociated with a detector element p () of the measurement device.