The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Oct. 19, 2020
Applicant:
Adeka Corporation, Tokyo, JP;
Inventors:
Atsushi Sakurai, Tokyo, JP;
Masako Hatase, Tokyo, JP;
Masaki Enzu, Tokyo, JP;
Keisuke Takeda, Tokyo, JP;
Ryota Fukushima, Tokyo, JP;
Atsushi Yamashita, Tokyo, JP;
Assignee:
ADEKA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C07D 487/10 (2006.01); C07F 1/00 (2006.01); C07F 3/00 (2006.01); C07F 7/22 (2006.01); C07F 13/00 (2006.01); C07F 15/04 (2006.01); C07F 15/06 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C07D 487/10 (2013.01); C07F 1/005 (2013.01); C07F 3/003 (2013.01); C07F 7/2284 (2013.01); C07F 13/005 (2013.01); C07F 15/045 (2013.01); C07F 15/065 (2013.01); C23C 16/45553 (2013.01);
Abstract
Provided is a thin-film forming raw material containing a compound represented by the following formula (1): in the formula (1), Rto Reach independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a group containing a fluorine atom, M represents a metal atom, and 'n' represents a valence of the metal atom represented by M, provided that at least one of R, R, and Rrepresents the group containing a fluorine atom.