The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2024
Filed:
Dec. 10, 2019
Applicant:
Basf SE, Ludwigshafen am Rhein, DE;
Inventors:
Sathana Kitayaporn, Hillsboro, OR (US);
Charlotte Emnet, Ludwigshafen, DE;
Dieter Mayer, Ludwigshafen, DE;
Nadine Engelhardt, Ludwigshafen, DE;
Marco Arnold, Ludwigshafen, DE;
Lucas Benjamin Henderson, Ludwigshafen, DE;
Alexander Fluegel, Ludwigshafen, DE;
Assignee:
BASF SE, Ludwigshafen am Rhein, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/18 (2006.01); C25D 3/12 (2006.01); C25D 5/18 (2006.01); C25D 7/12 (2006.01);
U.S. Cl.
CPC ...
C25D 3/18 (2013.01); C25D 3/12 (2013.01); C25D 5/18 (2013.01); C25D 7/123 (2013.01);
Abstract
Described herein is a composition including metal ions consisting essentially of cobalt ions, and a specific monomeric and polymeric suppressing agent including a carboxylic, sulfonic, sulfinic, phosphonic, or phosphinic acid functional groups which show a suppressing effect that is required for void-free bottom-up filling of nanometer-sized recessed features.