The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Sep. 09, 2021
Applicant:
Changxin Memory Technologies, Inc., Hefei, CN;
Inventor:
Jo-Lan Chin, Hefei, CN;
Assignee:
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01B 11/24 (2006.01); G01B 11/26 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01B 11/24 (2013.01); G01B 11/26 (2013.01);
Abstract
A method for determining a contour of a semiconductor structure is disclosed, which includes: acquiring a best inclination angle of an electron beam; irradiating a sidewall of the semiconductor structure with the electron beam at the best inclination angle, to obtain a measured width of an orthographic projection of the sidewall of the semiconductor structure within a plane perpendicular to an incidence direction of the electron beam; and determining whether a bottom of the semiconductor structure is necked based on the measured width.