The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Mar. 19, 2020
Ebara Corporation, Tokyo, JP;
Mitsuru Miyazaki, Tokyo, JP;
Takuya Inoue, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Exemplary substrate supporting apparatus and method for attaching and/or detaching substrate are provided. In one aspect, substrate supporting apparatus has a plurality of supporting membersthat contacts a circumferential part of a substrate W and rotate the substrate W; a pair of driven memberson which the plurality of supporting membersare provided; a connecting memberconnecting one driven memberand another driven member; and a driving devicethat brings the pair of driven membersclose to each other or separates the pair of driven membersfrom each other, linearly along a first direction, by moving at least a part of the connecting member. Numerous other aspects are provided.