The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Oct. 22, 2021
Jsr Corporation, Tokyo, JP;
Kazuya Kiriyama, Tokyo, JP;
Katsuaki Nishikori, Tokyo, JP;
Takuhiro Taniguchi, Tokyo, JP;
Ryuichi Nemoto, Tokyo, JP;
Ken Maruyama, Tokyo, JP;
JSR CORPORATION, Tokyo, JP;
Abstract
A radiation-sensitive resin composition includes a resin having a partial structure represented by formula (1). Rand Reach independently represent a substituted or unsubstituted chain aliphatic hydrocarbon group having 1 to 6 carbon atoms or a substituted or unsubstituted alicyclic hydrocarbon group having 3 to 6 carbon atoms, or Rand Rare bonded to each other to form a part of a 3- to 6-membered cyclic structure together with the carbon atom to which Rand Rare bonded; Rrepresents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and containing a fluorine atom. No fluorine atom is bonded to carbon atoms located at α-, β- and γ-positions of the carbon atom to which Rand Rare bonded; and No fluorine atom is bonded to carbon atoms located at α- and β-positions of the carbon atom to which Ris bonded.