The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Aug. 04, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kun Xu, Sunol, CA (US);
Benjamin Cherian, San Jose, CA (US);
Jun Qian, Sunnyvale, CA (US);
Kiran Lall Shrestha, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/00 (2012.01); B24B 37/013 (2012.01); G05B 19/418 (2006.01); G06N 3/045 (2023.01); G06N 3/08 (2023.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
B24B 37/013 (2013.01); G05B 19/4188 (2013.01); G06N 3/045 (2023.01); G06N 3/08 (2013.01); H01L 23/00 (2013.01); G05B 2219/32335 (2013.01);
Abstract
A method of training a neural network includes obtaining two ground truth thickness profiles a test substrate, obtaining two thickness profiles for the test substrate as measured by an in-situ monitoring system while the test substrate is on polishing pads of different thicknesses, generating an estimated thickness profile for another thickness value that is between the two thickness values by interpolating between the two profiles, and training a neural network using the estimated thickness profile.