The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Apr. 02, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Teunis Willem Tukker, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Nitesh Pandey, Eindhoven, NL;
Marinus Petrus Reijnders, Eindhoven, NL;
Ferry Zijp, Nuenen, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/47 (2006.01); G02B 5/30 (2006.01); G02B 27/28 (2006.01); G02B 27/42 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01N 21/4788 (2013.01); G02B 5/3083 (2013.01); G02B 27/283 (2013.01); G02B 27/4205 (2013.01); G03F 7/70616 (2013.01); G03F 7/706851 (2023.05); G06T 2207/10148 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.