The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Jun. 09, 2022
Macronix International Co., Ltd., Hsinchu, TW;
Chih-Kai Yang, Kaohsiung, TW;
Tzung-Ting Han, Hsinchu, TW;
MACRONIX International Co., Ltd., Hsinchu, TW;
Abstract
Provided is a memory device including a stack structure, a first set of vertical channel structures, a second set of vertical channel structures and a first slit. The stack structure is disposed on a substrate, wherein a top surface of the substrate is parallel to a plane defined by a X direction and a Y direction perpendicular to the X direction. The first set of vertical channel structures and the second set of vertical channel structures are arranged along the Y direction and penetrating through the stack structure along a Z direction vertical to the plane to contact the substrate. The first slit is disposed between the first and second sets of vertical channel structures, and penetrates through the stack structure along the Z direction to expose the substrate, wherein the first slit includes a plurality of first sub-slits discretely disposed along the X direction.