The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Aug. 11, 2021
Applicant:

Fasford Technology Co., Ltd., Yamanashi, JP;

Inventors:

Ryo Saegusa, Minami-Alps, JP;

Masayuki Mochizuki, Minami-Alps, JP;

Keita Yamamoto, Minami-Alps, JP;

Assignee:

Fasford Technology Co., Ltd., Minami-Alps, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); H01L 21/68764 (2013.01); H01L 2224/75702 (2013.01);
Abstract

A die bonding apparatus includes: a driven body; and a table for driving the driven body. The table includes: a base; a linear motor having a first mover that moves the driven body, and a stator; a first linear motion guide that is provided between the base and the stator and capable of freely moving the stator; a second linear motion guide that is provided between the base and the first mover and capable of freely moving the first mover; a second mover provided in the form of being fixed to the base; and a control device for controlling the first mover and the second mover. The control device is configured to move the stator along the first linear motion guide using the second mover.


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