The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Jul. 30, 2021
Asml Netherlands B.v., Veldhoven, NL;
Christophe David Fouquet, Retie, BE;
Bernardo Kastrup, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Johannes Catharinus Hubertus Mulkens, Valkenswaard, NL;
James Benedict Kavanagh, Veldhoven, NL;
James Patrick Koonmen, Santa Clara, CA (US);
Neal Patrick Callan, Lake Oswego, OR (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A defect prediction method for a device manufacturing process involving processing a portion of a design layout onto a substrate, the method including: identifying a hot spot from the portion of the design layout; determining a range of values of a processing parameter of the device manufacturing process for the hot spot, wherein when the processing parameter has a value outside the range, a defect is produced from the hot spot with the device manufacturing process; determining an actual value of the processing parameter; determining or predicting, using the actual value, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the hot spot with the device manufacturing process.