The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Jan. 21, 2021
Applicant:

Rohm and Haas Electronic Materials Cmp Holdings, Inc., Newark, DE (US);

Inventors:

Bryan E. Barton, Lincoln University, PA (US);

Teresa Brugarolas Brufau, Philadelphia, PA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); B24B 37/22 (2012.01); B24B 37/26 (2012.01); B24D 18/00 (2006.01); C08G 18/10 (2006.01); C08G 18/12 (2006.01); C08G 18/18 (2006.01); C08G 18/28 (2006.01); C08G 18/32 (2006.01); C08G 18/38 (2006.01); C08G 18/48 (2006.01); C08G 18/58 (2006.01); C08G 18/65 (2006.01); C08G 18/66 (2006.01); C08G 18/76 (2006.01); C08G 18/80 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); B24B 37/22 (2013.01); B24B 37/26 (2013.01); B24D 18/0009 (2013.01); C08G 18/10 (2013.01); C08G 18/12 (2013.01); C08G 18/1808 (2013.01); C08G 18/2835 (2013.01); C08G 18/3203 (2013.01); C08G 18/3206 (2013.01); C08G 18/3225 (2013.01); C08G 18/324 (2013.01); C08G 18/3857 (2013.01); C08G 18/3868 (2013.01); C08G 18/4808 (2013.01); C08G 18/4825 (2013.01); C08G 18/4829 (2013.01); C08G 18/4841 (2013.01); C08G 18/4854 (2013.01); C08G 18/58 (2013.01); C08G 18/6511 (2013.01); C08G 18/6674 (2013.01); C08G 18/6685 (2013.01); C08G 18/76 (2013.01); C08G 18/7671 (2013.01); C08G 18/8019 (2013.01); H01L 21/30625 (2013.01);
Abstract

CMP polishing pads or layers made from a polyurethane reaction product of a reaction mixture comprising (i) a liquid aromatic isocyanate component comprising one or more aromatic diisocyanates or a linear aromatic isocyanate-terminated urethane prepolymer, and (ii) a liquid polyol component comprising a) one or more polymeric polyols, b) from 12 to 40 wt. %, based on the total weight of the liquid polyol component, of a curative mixture of one or more small chain difunctional polyols having from 2 to 9 carbon atoms, a liquid aromatic diamine, wherein the mole ratio of liquid aromatic diamine to the total moles of small chain difunctional polyols and liquid aromatic diamine ranges from 15:85 to 40:60, wherein, the reaction mixture comprises 48 to 68 wt. % hard segment materials.


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