The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Sep. 14, 2021
Disco Corporation, Tokyo, JP;
Kenji Furuta, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A wafer processing method includes an adhesive film bonding step of bonding an adhesive film on a side of a back surface of the wafer, an adhesive film cutting-off step of cutting off at least the adhesive film that is bonded on the side of the back surface of the wafer along streets from the side of the back surface of the wafer, a modified layer forming step of irradiating a laser beam of a wavelength that has transmissivity through the wafer with the laser beam focused inside the wafer, so that modified layers are formed along the streets, respectively, and a dividing step of, after performing the adhesive film cutting-off step and the modified layer forming step, applying an external force to the wafer so that the wafer is divided from the modified layers as starting points.