The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
May. 07, 2021
Disco Corporation, Tokyo, JP;
Karl Heinz Priewasser, Munich, DE;
DISCO CORPORATION, Tokyo, JP;
Abstract
The invention relates to a method of producing a substrate. The method comprises providing a workpiece having a first surface and a second surface opposite the first surface, and providing a carrier having a first surface and a second surface opposite the first surface. The method further comprises attaching the carrier to the workpiece, wherein at least a peripheral portion of the first surface of the carrier is attached to the first surface of the workpiece, and forming a modified layer inside the workpiece. Moreover, the method comprises dividing the workpiece along the modified layer, thereby obtaining the substrate, wherein the substrate has the carrier attached thereto, and removing carrier material from the side of the second surface of the carrier in a central portion of the carrier so as to form a recess in the carrier. The invention further relates to a substrate producing system for performing this method.