The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Feb. 17, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Zihao Yang, Santa Clara, CA (US);
Mingwei Zhu, San Jose, CA (US);
Shriram Mangipudi, Santa Clara, CA (US);
Mohammad Kamruzzaman Chowdhury, Phoenix, AZ (US);
Shane Lavan, Palo Alto, CA (US);
Zhebo Chen, San Jose, CA (US);
Yong Cao, San Jose, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of fabricating a device including a superconductive layer includes depositing a seed layer on a substrate at a first temperature, the seed layer being a nitride of a first metal, reducing the temperature of the substrate to a second temperature that is lower than the first temperature, increasing the temperature of the substrate to a third temperature that is higher than the first temperature to form a modified seed layer, and depositing a metal nitride superconductive layer directly on the modified seed layer at the third temperature, the superconductive layer being a nitride of a different second metal.