The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2024

Filed:

Sep. 15, 2021
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Chih-Wei Hu, Miaoli County, TW;

Teng-Hao Yeh, Hsinchu County, TW;

Hang-Ting Lue, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); H10B 41/27 (2023.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); H10B 41/27 (2023.02);
Abstract

A three-dimensional AND flash memory device includes a stack structure, isolators, channel pillars, source pillars and drain pillars, and charge storage structures. The stack structure is located on a dielectric substrate and includes gate layers and insulating layers alternately stacked with each other. The isolators divide the stack structure into sub-blocks and include walls and slits. The walls include isolation layers and the insulating layers stacked alternately with each other, and the isolation layers are buried in the gate layers. The slits alternate with the walls, and each of the slits extends through the stack structure. The channel pillars extend through the stack structure in each of the sub-blocks. The source pillars and the drain pillars are located in the channel pillars. The charge storage structures are located between the gate layers and the channel pillar.


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