The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Apr. 22, 2021
Kla Corporation, Milpitas, CA (US);
Kedar Grama, Fremont, CA (US);
Santosh Kumar, San Jose, CA (US);
KLA Corp., Milpitas, CA (US);
Abstract
Methods and systems for determining information for a specimen are provided. The embodiments described herein are configured for training a machine learning (ML) model for generating higher resolution images of a specimen from images of the specimen generated by an inspection subsystem. The training includes a pre-training step that is performed using only simulated images and a re-training step that is performed using actual images of a test specimen. The higher resolution images generated by the trained ML model from lower resolution inspection images can be used for applications to including nuisance filtering and defect classification.