Capacitance measurement method, system and apparatus, electronic device, and storage medium

Abstract

Embodiments of the disclosure provide a capacitance measurement method, system and apparatus, an electronic device, and a storage medium. The method is applied to a machine table and includes: obtaining a calibration file including multiple first capacitance values corresponding to a measurement probe card while the measurement probe card is floating; measuring, by the measurement probe card, multiple semiconductor devices simultaneously to obtain multiple second capacitance values corresponding to the multiple semiconductor devices, the multiple semiconductor devices being located on a same test module of a semiconductor chip; and determining target capacitance values of the multiple semiconductor devices based on the multiple first capacitance values and the multiple second capacitance values.