The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

Aug. 04, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Ching-Hui Lin, Taichung, TW;

Chun-Ren Cheng, Hsin-Chu, TW;

Shih-Fen Huang, Jhubei, TW;

Fu-Chun Huang, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); G01N 27/414 (2006.01); H10N 30/05 (2023.01); H10N 30/08 (2023.01); H10N 30/30 (2023.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01);
U.S. Cl.
CPC ...
H10N 30/302 (2023.02); G01N 27/4141 (2013.01); H10N 30/05 (2023.02); H10N 30/08 (2023.02); H10N 30/878 (2023.02); H10N 30/88 (2023.02);
Abstract

In some embodiments, a piezoelectric biosensor is provided. The piezoelectric biosensor includes a semiconductor substrate. A first electrode is disposed over the semiconductor substrate. A piezoelectric structure is disposed on the first electrode. A second electrode is disposed on the piezoelectric structure. A sensing reservoir is disposed over the piezoelectric structure and exposed to an ambient environment, where the sensing reservoir is configured to collect a fluid comprising a number of bio-entities.


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