Substrate processing method

Abstract

Disclosed is a substrate processing method including: a pressurizing operation of raising a process pressure from a first pressure (P) to a second pressure (P) that is greater than the atmospheric pressure; a depressurizing operation of lowering the process pressure from a sixth pressure (P), which is greater than the atmospheric pressure, to a seventh pressure (P); and an annealing operation of changing the process pressure into a preset pressure change pattern between the pressurizing operation and the depressurizing operation, under a temperature atmosphere of a second temperature (T) higher than the room temperature. A temperature raising operation of raising a temperature atmosphere from a first temperature (T) to the second temperature (T) is performed from a preset temperature raising start point (t) to a preset temperature raising end point (t) while the pressurizing operation is performed or after the pressurizing operation is performed.