The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
Jul. 07, 2022
The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, CN;
Yan Liu, Shijiazhuang, CN;
Aihua Wu, Shijiazhuang, CN;
Wei Wang, Shijiazhuang, CN;
Yuwei Zhai, Shijiazhuang, CN;
Hao Li, Shijiazhuang, CN;
Chen Ding, Shijiazhuang, CN;
Xiaodong Jing, Shijiazhuang, CN;
Baicheng Sheng, Shijiazhuang, CN;
Abstract
A three-dimensional displacement compensation method is provided. The method includes an obtaining step, a transforming step, a first determining step, a first calculating step and a compensating step. The obtaining step includes obtaining a current image of a measured element captured by a microscopic thermoreflectance thermography device. The transforming step includes two sub-steps. One sub-step uses Fourier transform to calculate a reference image to obtain a first result, and the other sub-step uses Fourier transform to calculate the current image to obtain a second result. The first determining step includes determining a peak point coordinate and a fitting diameter of a point spread function of an optical system of the device. The first calculating step includes calculating a three-dimensional displacement of the position to be compensated relative to the reference position. The compensating step compensates the position to be compensated.