The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2024

Filed:

May. 26, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;

Inventors:

Chewn-Pu Jou, Hsinchu, TW;

Feng Wei Kuo, Zhudong Township, TW;

Huan-Neng Chen, Taichung, TW;

Lan-Chou Cho, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/04 (2006.01); G01J 1/42 (2006.01); G01J 1/44 (2006.01); G02B 6/42 (2006.01);
U.S. Cl.
CPC ...
G01J 1/0422 (2013.01); G01J 1/0474 (2013.01); G01J 1/4228 (2013.01); G01J 1/44 (2013.01); G02B 6/4206 (2013.01);
Abstract

A device includes a scattering structure and a collection structure. The scattering structure is arranged to concurrently scatter incident electromagnetic radiation along a first scattering axis and along a second scattering axis. The first scattering axis and the second scattering axis are non-orthogonal. The collection structure includes a first input port aligned with the first scattering axis and a second input port aligned with the second scattering axis. A method includes scattering electromagnetic radiation along a first scattering axis to create first scattered electromagnetic radiation and along a second scattering axis to create second scattered electromagnetic radiation. The first scattering axis and the second scattering axis are non-orthogonal. The first scattered electromagnetic radiation is detected to yield first detected radiation and the second scattered electromagnetic radiation is detected to yield second detected radiation. The first detected radiation is phase aligned with the second detected radiation.


Find Patent Forward Citations

Loading…