Method of manufacturing a semiconductor apparatus having stacked devices

Abstract

A method for forming a semiconductor apparatus includes forming a plurality of repetitive initial structures over a substrate of the semiconductor apparatus. An initial structure in the plurality of repetitive initial structures is formed by forming a first stack of transistors along a Z direction substantially perpendicular to a substrate plane, and forming local interconnect structures. Each of the transistors in the first stack of transistors is sandwiched between two of the local interconnect structures. Vertical conductive structures are formed substantially parallel to the Z direction, a height of one of the vertical conductive structures along the Z direction being at least a height of the initial structure. The initial structure is functionalized into a final structure by forming one or more connections each electrically coupling one of the local interconnect structures to one of the vertical conductive structures.