The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2024

Filed:

Dec. 23, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Libor Novak, Brno, CZ;

Krishna Kanth Neelisetty, Brno, CZ;

Veronika Hammerova, Brno, CZ;

Jan Lasko, Brno, CZ;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2204 (2018.01); G01N 23/2251 (2018.01); G01N 23/2273 (2018.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2204 (2013.01); G01N 23/2251 (2013.01); G01N 23/2273 (2013.01); H01J 37/20 (2013.01);
Abstract

A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.


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