The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2024

Filed:

Jun. 28, 2021
Applicant:

Stmicroelectronics Pte Ltd, Singapore, SG;

Inventor:

David Gani, Choa Chu kang, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/16 (2023.01); G01S 17/04 (2020.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 31/02 (2006.01); H01L 31/167 (2006.01); H01L 31/18 (2006.01); H01S 5/02325 (2021.01); H04M 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 25/167 (2013.01); G01S 17/04 (2020.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 31/02005 (2013.01); H01L 31/167 (2013.01); H01L 31/1804 (2013.01); H01L 31/186 (2013.01); H01S 5/02325 (2021.01); H04M 1/026 (2013.01); G06F 2203/04105 (2013.01);
Abstract

Wafer level proximity sensors are formed by processing a silicon substrate wafer and a silicon cap wafer separately, bonding the cap wafer to the substrate wafer, forming an interconnect structure of through-silicon vias within the substrate, and singulating the bonded wafers to yield individually packaged sensors. The wafer level proximity sensor is smaller than a conventional proximity sensor and can be manufactured using a shorter fabrication process at a lower cost. The proximity sensors are coupled to external components by a signal path that includes the through-silicon vias and a ball grid array formed on a lower surface of the silicon substrate. The design of the wafer level proximity sensor passes more light from the light emitter and more light to the light sensor.


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