The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11994555 B1

Date of Patent:

May. 28, 2024

Filed:

Aug. 28, 2021

Probe card with angled probe and wafer testing method using the same

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yuan-Chun Wu, Shanghai, CN;

Chang-Chun Xu, Shanghai, CN;

Ni Shen, Shanghai, CN;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

Maschoff Brennan

Primary Examiner:

Huy Q Phan

Assistant Examiner:

David B Frederiksen

Int. Cl.

CPC ...

G01R 31/28 (2006.01); H01L 21/66 (2006.01);

U.S. Cl.

CPC ...

G01R 31/2891 (2013.01); G01R 31/2831 (2013.01); G01R 31/2884 (2013.01); H01L 22/34 (2013.01);

Abstract

A probe card includes a circuit board, a fixing member, and a plurality of probes. The fixing member is fixed on the circuit board and has a through opening therein. The fixing member has opposite first and second sidewalls defining the through opening. Each of the probes includes an arm portion and a tip portion. One end of the arm portion is connected to the circuit board. The tip portion extends from the arm portion. The arm portions of the probes extend in substantially a same direction inclined to a direction perpendicular to the first sidewall of the fixing member in a top view.

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Wu, Yuan-Chun. (2024). Probe card with angled probe and wafer testing method using the same (U.S. Patent No. 11994555). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11994555

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