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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11990545 B1

PDFFull Text
Date of Patent:
May. 21, 2024

Filed:

Oct. 19, 2022

Semiconductor device having fully oxidized gate oxide layer and method for making the same

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Tsu-Hsiu Perng, Hsinchu, TW;

Yun-Chi Wu, Hsinchu, TW;

Chia-Chen Chang, Hsinchu, TW;

Cheng-Bo Shu, Hsinchu, TW;

Jyun-Guan Jhou, Hsinchu, TW;

Pei-Lun Wang, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Richard A Booth

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7816 (2013.01); H01L 21/0214 (2013.01); H01L 21/0223 (2013.01); H01L 29/0611 (2013.01); H01L 29/66681 (2013.01);
Abstract

A method for making a semiconductor device includes forming a ROX layer on a substrate and a patterned silicon oxynitride layer on the patterned ROX layer; conformally forming a dielectric oxide layer to cover the substrate, the patterned silicon oxynitride layer, and the patterned ROX layer; and fully oxidizing the patterned silicon oxynitride layer to form a fully oxidized gate oxide layer on the substrate.

Find Patent Forward Citations

Perng, Tsu-Hsiu. (2024). Semiconductor device having fully oxidized gate oxide layer and method for making the same (U.S. Patent No. 11990545). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11990545

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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