The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Mar. 05, 2020
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Manfred Matena, Essen, DE;
Franz-Josef Stickel, Aalen-Unterrombach, DE;
Marc Saitner, Oberkochen, DE;
Robert Fichtl, Aalen, DE;
Hans-Peter Brust, Essingen-Lauterburg, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 13/01 (2006.01); B24B 37/26 (2012.01); B24D 13/14 (2006.01);
U.S. Cl.
CPC ...
B24B 13/01 (2013.01); B24B 37/26 (2013.01); B24D 13/147 (2013.01); B24D 2203/00 (2013.01);
Abstract
A method for the zonal polishing of a workpiece includes using a polishing tool to guide a structured polishing pad over the surface of workpiece to remove material from the workpiece. A structured polishing pad includes a structuring adapted to the movement of a polishing tool.