The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Sep. 08, 2021
Changxin Memory Technologies, Inc., Hefei, CN;
Yong Lu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
The present disclosure relates to the technical field of semiconductor manufacturing, and provides a semiconductor structure and a forming method thereof. The forming method includes: providing a semiconductor substrate, where a surface of the semiconductor substrate is provided with a plurality of conductive structures arranged at intervals; forming sidewall dielectric layers on surfaces of the conductive structures, and then depositing sequentially and alternately to form at least two supporting layers and sacrificial layers; etching the supporting layers and the sacrificial layers to form contact holes exposing the surfaces of the conductive structures; and forming an electrode layer on surfaces of the contact holes.