The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2024

Filed:

May. 17, 2023
Applicant:

Advanced Energy Industries, Inc., Denver, CO (US);

Inventors:

Daniel Carter, Fort Collins, CO (US);

Randy Heckman, Fort Collins, CO (US);

Victor Brouk, Fort Collins, CO (US);

Daniel J. Hoffman, Fort Collins, CO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32009 (2013.01); C23C 14/345 (2013.01); H01J 37/32174 (2013.01); H01J 37/32935 (2013.01); H01J 37/3299 (2013.01);
Abstract

An apparatus and method to produce a waveform. The apparatus includes a first node, a first power supply coupled to a second node, a first switch that couples the second node to the first node, and responsive to the first switch being closed, a peak voltage is applied at the first node. The apparatus also includes a second switch that couples a third node to the first node, and responsive to the second switch being closed, a voltage step is applied at the first node. In addition, a second power supply is coupled to the first node to produce a ramped voltage at the first node.


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