The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
May. 02, 2023
Xwinsys Technology Development Ltd., Migdal HaEmek, IL;
Kiyoshi Ogata, Tokyo, JP;
Avishai Shklar, Kfar Vitkin, IL;
Doron Reinis, Gival Ela, IL;
Ofek Oiknine, Ramat Yishai, IL;
Xwinsys Technology Development Ltd., Migdal HaEmek, IL;
Abstract
A sample inspection system is described. The system comprises at least first and second inspection units positioned above a sample region. Each of said at least first and second inspection unit comprises at least one X-ray radiation source and respective detector arrangement and configured for X-ray fluorescent inspection of a sample. Wherein the first and second x-ray inspection units provide first and second inspection properties different in at least one of: bandwidth of emitted X-ray energies, energy of emitted X-rays, spot size of X-ray beam generated on a sample.