The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Dec. 22, 2020
Elke Hoinkis, Darmstadt, DE;
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Daniel Rhinow, Frankfurt am Main, DE;
Markus Bauer, Rossdorf, DE;
Rainer Fettig, Steinmauern, DE;
David Lämmle, Darmstadt, DE;
Marion Batz, Wiesbaden, DE;
Katharina Gries, Darmstadt, DE;
Sebastian Vollmar, Dieburg, DE;
Petra Spies, Mainz, DE;
Ottmar Hoinkis, Darmstadt, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.