The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Jan. 27, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Christopher Campbell, Newburyport, MA (US);
Costel Biloiu, Rockport, MA (US);
Peter F. Kurunczi, Cambridge, MA (US);
Jay R. Wallace, Danvers, MA (US);
Kevin M. Daniels, Lynnfield, MA (US);
Kevin T. Ryan, Wilmington, MA (US);
Minab B. Teferi, Gloucester, MA (US);
Frank Sinclair, Boston, MA (US);
Joseph C. Olson, Beverly, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.