The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Mar. 14, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Shailendra Srivastava, Fremont, CA (US);
Syed Alam, Sunnyvale, CA (US);
Nikhil Sudhindrarao Jorapur, Sunnyvale, CA (US);
Daemian Raj Benjamin Raj, Fremont, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F25D 17/06 (2006.01); F25B 21/02 (2006.01); H01L 21/67 (2006.01); H10N 10/13 (2023.01);
U.S. Cl.
CPC ...
F25D 17/06 (2013.01); F25B 21/02 (2013.01); H10N 10/13 (2023.02); F25B 2321/0251 (2013.01); H01L 21/67017 (2013.01);
Abstract
A fluid delivery device is disclosed. The fluid delivery device includes a fluid flow meter. The fluid flow meter is enclosed in an insulated box. An intake is provided on the insulated box for providing a forced cooling gas flow over the fluid flow meter. An exhaust is provided on the insulated box from which the forced cooling gas exits the insulated box.