The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
May. 07, 2020
Cabot Microelectronics Corporation, Aurora, IL (US);
Paul Andre Lefevre, Portland, OR (US);
Devin Schmitt, Portland, OR (US);
Jaeseok Lee, Beaverton, OR (US);
Eric S. Moyer, Aurora, IL (US);
Holland Hodges, Sammamish, WA (US);
CMC MATERIALS LLC, Aurora, IL (US);
Abstract
A chemical mechanical polishing pad includes a surface portion of a first material. The surface portion includes a plurality of grooves. A first portion of the grooves are exposed grooves located at a surface of the chemical mechanical polishing pad. A second portion of the grooves are buried grooves embedded below the surface of the chemical mechanical polishing pad, such that, during use of the chemical mechanical polishing pad, one or more of the buried grooves are exposed at the surface.