The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Mar. 28, 2019
Ulvac, Inc., Chigasaki, JP;
Yuusuke Ujihara, Chigasaki, JP;
Motoshi Kobayashi, Chigasaki, JP;
Yasuhiko Akamatsu, Chigasaki, JP;
Tomohiro Nagata, Chigasaki, JP;
Ryouta Nakamura, Chigasaki, JP;
Junichi Nitta, Chigasaki, JP;
Yasuo Nakadai, Chigasaki, JP;
ULVAC, INC., Chigasaki, JP;
Abstract
[Object] It is an object of the present invention to provide an aluminum alloy film having excellent bending resistance and heat resistance, and a thin film transistor including the aluminum alloy film. [Solving Means] In order to achieve the above-mentioned object, an aluminum alloy film according to an embodiment of the present invention includes: an Al pure metal that includes at least one type of a first additive element selected from the group consisting of Zr, Sc, Mo, Y, Nb, and Ti. A content of the first additive element is 0.01 atomic % or more and 1.0 atomic % or less. Such an aluminum alloy film has excellent bending resistance and excellent heat resistance. Further, also etching can be performed on the aluminum alloy film.