The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Oct. 26, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss X-ray Microscopy Inc., Dublin, CA (US);
Ramani Pichumani, Palo Alto, CA (US);
Christoph Hilmar Graf vom Hagen, Oakland, CA (US);
Jens Timo Neumann, Aalen, DE;
Johannes Ruoff, Aalen, DE;
Thomas Matthew Gregorich, Milpitas, CA (US);
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss X-ray Microscopy Inc., Dublin, CA (US);
Abstract
A method for acquiring a 3D image of a sample structure includes acquiring a first raw 2D set of 2D images of a sample structure at a limited number of raw sample planes; calculating a 3D image of the sample structure represented by a 3D volumetric image data set; and extracting a measurement parameter from the 3D volumetric image data set. A further number of interleaving 2D image acquisitions are recorded at a further number of interleaved sample planes which do not coincide with previous acquisition sample planes. The steps 'calculating,' “extracting” and “assigning” are repeated for the further interleaving 2D set until convergence or a maximum number of 2D image acquisitions is recorded. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Such method can also be used to acquire virtual tomographic images of a sample.