The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Oct. 07, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Toralf Gruner, Aalen-Hofen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01); G02B 5/18 (2006.01); G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70308 (2013.01); G03F 7/70266 (2013.01); G03F 7/70316 (2013.01); G02B 5/18 (2013.01); G02B 5/20 (2013.01);
Abstract
A projection exposure method for exposing a radiation-sensitive substrate with at least one image of a pattern of a mask is provided in which an illumination field of the mask is illuminated by illumination radiation with an operating wavelength λ that was provided by an illumination system.